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Dynamic mea-
sured instrument
Laser Vibrometer
(LDV)
Polytec
Shaker in-
strument (LDS)
Rate table
instrument
Lynceetec
Static mea-
sured instrument
Thin Film Mea-
surement System
AFM
Optical microscope
SEM
LCR meter
&Probe Station
Network analyzer
真空腔
Optical Pro-
filing System
IR camera
Manual Flip-Chip bonder
White Light Interferometry(ZYGO)
Confocal Laser Scanning Microscope(Keyence)
Metallurgical Microscope(Olympus)
Fabricated facility
Thermal Pyrolysis
Chemical Vapor
Deposition System
Parylene Depo-
sited System
E-gun
Electroplating
system
Shaker instrument (LDS)
For accelerometer sensor measurement
Input acceleration range:10g
Sensitivity measurement
Rate table instrument (Acutronic)
For Tilt sensor Accelerometer & Gyro measurement
Output rating control
Position control
Sinusoid driving test