Dynamic mea-
sured instrument

• Laser Vibrometer
  (LDV)
• Polytec
• Shaker in-
  strument (LDS)
• Rate table
  instrument
• Lynceetec

Static mea-
sured instrument

• Thin Film Mea-
  surement System
• AFM
• Optical microscope
• SEM
• LCR meter
  &Probe Station
• Network analyzer
• 真空腔
• Optical Pro-
  filing System
• IR camera
• Manual Flip-Chip bonder
• White Light Interferometry(ZYGO)
• Confocal Laser Scanning Microscope(Keyence)
• Metallurgical Microscope(Olympus)

Fabricated facility

• Thermal Pyrolysis
  Chemical Vapor
  Deposition System
• Parylene Depo-
  sited System
• E-gun
• Electroplating
  system

Lynceetec

Digital Holographic Microscopy

• Vibration mode shape measurement
• Frequency range：25 MHz
• In-plane and out-of-plane measurement
• Two port AC/DC input ((different phase))