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Dynamic mea-
sured instrument
Laser Vibrometer
(LDV)
Polytec
Shaker in-
strument (LDS)
Rate table
instrument
Lynceetec
Static mea-
sured instrument
Thin Film Mea-
surement System
AFM
Optical microscope
SEM
LCR meter
&Probe Station
Network analyzer
真空腔
Optical Pro-
filing System
IR camera
Manual Flip-Chip bonder
White Light Interferometry(ZYGO)
Confocal Laser Scanning Microscope(Keyence)
Metallurgical Microscope(Olympus)
Fabricated facility
Thermal Pyrolysis
Chemical Vapor De-
position System
Parylene Deposited
System
E-gun
Electroplating
system
Laser Vibrometer (LDV)
Feature:Out-of-plane vibration measurement Single point measurement
Frequency range:DC ~ 1.3 MHz (typical)
Displacement range:±10^-2 m ~ ±10^-6 m
Velocity range:±0.1 m/s ~ ±8 m/s
Acceleration range:±10^2 m/s^2 ~ ±10^6 m/s^2
Polytec
a. 1MHz,b. Show mode shape,
c. Multi-points measure
d. Both In-plane and Out-of-plane modal