Dynamic mea-
sured instrument
Static mea-
sured instrument
- Thin Film Mea-
surement System - AFM
- Optical microscope
- SEM
- LCR meter
&Probe Station - Network analyzer
- 真空腔
- Optical Pro-
filing System - IR camera
- Manual Flip-Chip bonder
- White Light Interferometry(ZYGO)
- Confocal Laser Scanning Microscope(Keyence)
- Metallurgical Microscope(Olympus)
Fabricated facility
Thermal Pyrolysis
Chemical Vapor De-
position System
Deposited CNT’s
Parylene Deposited
System
Deposited parylene