真空腔

    Optical Profiling System

    Features：

  • Visualize moving MEMS devices in 3D
  • Measure in-plane and out-of-plane dimensions
  • Dynamic and static MEMS metrology on a single system
  • System Measurement techniques: optical phase-shift and white light vertical scanning interferometry
  • Light source: integrated, stroboscopic illuminator
  • Static measurement performance
  • Vertical measurement range: 0.1mm to 1mm
  • Vertical scan speed: up to 14.4um/s
  • Dynamic measurement performance
  • Vertical measurement range: height or deformations up to 1mm
  • Vertical motion resolution: <1nm Waveforms: DC, sine, triangular, rectangular, user-defined
  • Frequency: 15Hz to 1MHz