Dynamic mea-
sured instrument

• Laser Vibrometer
  (LDV)
• Polytec
• Shaker in-
  strument (LDS)
• Rate table
  instrument
• Lynceetec

Static mea-
sured instrument

• Thin Film Mea-
  surement System
• AFM
• Optical microscope
• SEM
• LCR meter
  &Probe Station
• Network analyzer
• 真空腔
• Optical Pro-
  filing System
• IR camera
• Manual Flip-Chip bonder
• White Light Interferometry(ZYGO)
• Confocal Laser Scanning Microscope(Keyence)
• Metallurgical Microscope(Olympus)

Fabricated facility

• Thermal Pyrolysis
  Chemical Vapor
  Deposition System
• Parylene Depo-
  sited System
• E-gun
• Electroplating
  system

E-gun

Various Metal

Electroplating system

Ni, Cu(right), SnPb

NTHU PME Micro Device Laboratory, Mo. 101 Sec2, guangfu Rd. Hsinchu, Taiwan 300 All rights reserved
Micro Device Laboratory Department of Power Mechanical Engineering,
MEMS Inst.National Tsing Hua University, Taiwan Tel:886-3-571-5131 Ext:33742 Fax:886-3-573-9372