ZYGO

  • Non-contact measurement
  • Measurement range: 1 nm - 20000 μm
  • Sub-Angstrom surface and steep machined angles up to 85 degrees measurement
  • Automated part focus and setup
  • Vibration robust metrology
  • ±4 degree high load tilt stage with parcentric correction

    Keyence

  • Maximum magnification: 3600x
  • Height measurement accuracy: 0.2 + L /100 µm or less ,L = Measuring length
  • Width measurement accuracy: Measured value ±2 % or less
  • Measurement laser light source: Violet semiconductor laser, 404 nm, 1 mW
  • XY stage configuration - operating range: 100 mm x 100 mm