Now and future of Micro Device Laboratory (MDL)
Micro Device Laboratory, MDL, was devoted to develop MEMS that implemented in various applications, from design, fabrication, packaging, and even testing perspective. Not only devoted in research fields like nano- and biomedical technology, and mechanical characteristic of the microsystem, but also devoted to supply the industrial applications like information technology, semiconductor industry and various types of inertia measurement sensors. Now we have developed the following technologies:
Future goal of our lab is to apply planar fabrication technology in integration of biomedical and micro-mechanical system. We look forward to achieve integrated microsystem either by System in Packaging (SIP) or even System on Chip (SOC) as a long term goal.
Our research fields are as follows:
Micro mechanical structure is the key component in MEMS. The difference between micro fabrication and traditional mechanical machining technology will lead to some design difficulties when dealing with a micro mechanical structure. In our lab, we developed various design and fabrication techniques to fabricate sophisticated micro structures, even on the (111) silicon wafer. By doing this, we can get arbitrary geometry of micro structures. And by combining the theory of solid mechanics and characteristic of the fabrication technique, we can design microstructure that has the ability to modify statics and dynamics mechanical properties of a micro device. Such as stress releasing and stiffness enhancement structure in micro device in order to resist residual stress that coming from fabrication process. Or we can modify the quality factor and supporting stiffness of the device.
Besides micro mechanical structures, micro actuator is another key micro mechanical device. Now we have successfully developed various types of electrothermal and electrostatic actuators based on different fabrication process. Linear and rotational motion can be achieved by those actuators. In-plane and out-of-plane motion can be done at the same time to overcome the limitation during microstructure assembly. We can also improve the actuators output force and stroke by novel fabrication process and mechanism design. By integrating those actuators and other related microstructures, large numbers of micro-optical-mechanical device can be obtained. In-plane and out-of-plane motion can be done at the same time to overcome the limitation during microstructure assembly. We can also improve the actuators output force and stroke by novel fabrication process and mechanism design. By integrating those actuators and other related microstructures, large numbers of micro-optical-mechanical device can be obtained.
It has been 20 years past since the MEMS technology was developed. During those time period, the MUMPs multi-users fabrication platform was considered the most critical step for MEMS field. The importance of a successful multi-purpose MEMS fabrication platform pushes us forward to cope with a more feasible one. Now we have merged the above mentioned microstructures and microactuators process into a multi-users fabrication platform called MOSBE successfully. Thus we have the ability to integrate more devices into a more complex and multi-functions microsystem. By following the same ideas, we also accomplish BELST fabrication platform that can be used to manufacture high-aspect-ratio thick microstructure. Recently, we develop a technology that combined those merits from above mentioned platforms. The bottlenecks in traditional fabrication process are expected to be cleared up. Thus, various types of microstructure can be obtained.
Besides above topics, we try to accomplish system integration by SIP or SOC manners. We have some preliminary results on SIP. Regarding to SOC, we have team up with professors of opto-electronics and electrical control engineering institute of NCTU. Some preliminary results was obtained also by above mentioned fabrication platform. In short, we are step toward to our long term goal, micro-bio-optical mechanical system. In order to apply those MEMS techniques in bio- and nano- related applications.