SEM(New)

  • Modal：FlexSEM 1000 II
  • Secondary electron resolution:
    4.0nm (Acceleration voltage 20kV,WD=5mm, high-vacuum mode)
    15.0nm (Acceleration voltage 1kV,WD=5mm, high-vacuum mode)
  • Backscattered electron resolution:
    5.0nm (Acceleration voltage 20kV,WD=5mm, VP mode)
  • Magnification:
    6x to 300,000x
    16x to 800,000x
  • Accelerating voltage :
    0.3 kV to 20 kV
  • Maximum specimen size:
    80mm in diameter
  • Other function:
    raster rotation,dynamic focus,image enhancement, preset magnification,stage location navigation(SEM MAP)

    SEM

  • 廠牌型號：JEOL JSM-5610LV
  • 功能：可觀測微結構之表面形貌
  • 規格與解析能力：
    HV mode：3.0 nm guaranteed (Accelerating voltage 30 kV, WD 6 mm)
    ● Magnification: ×25 to 300,000
    ● Image mode: SEI, BEI
    ● Probe current: 1pA to 1uA

    LV mode：4.5 nm guaranteed (Accelerating voltage 30 kV, WD 8 mm)
    ● Chamber pressure: 10 to 270 Pa
    ● Lowest pressure: 1Pa
    ● Image mode: Three kinds of BEI (Composition image, Topographic image and Shaded image)