Dynamic mea-
sured instrument
Static mea-
sured instrument
Fabricated facility
AFM (CP-II)
- Probe head: tapping mode, contact mode
- Scan range: Maximum lateral scan range: < 90um
Maximum vertical scan range: < 7.5um
- Resolution: Maximum lateral resolution: 0.25A
Maximum vertical resolution: 0.025A
Sample size: 50mm (w) × 50mm (l) × 20mm (h)