Chih-ming Sun

    Journal＆Conference

  • 1. Chiung-Wen Lin, Chia-Pao Hsu, Hsueh-An Yang, Wei Chung Wang, and Weileun Fang, “Implementation of silicon-on-glass MEMS devices with embedded through-wafer silicon vias using the glass reflow process for wafer-level packaging and 3D chip integration”, J. Micromech. Microeng., 18, 2008.
  • 2. C.-W. Lin, C.-P. Hsu, H.-A. Yang, W. C. Wang, and W. Fang, “Implementation of SOG Devices with Embedded Through-wafer Silicon Vias Using a Novel Glass Reflow Process for Wafer-level 3D MEMS Integration,” IEEE MEMS’08, Tucson, AZ, USA, 2008.
  • 3. Chia-Pao Hsu, Wen-Chien Chen, Tsung-Lin Tang, Ming-Chuen Yip, Weileun Fang, ”The two-axis magnetostatic-drive single-crystal-Si micro scanner driven by back-side electroplating Ni film”, IEEE/LEOS Optical MEMS and Nanophotonics ‘08, Freiburg, DE, 2008.
  • 4. Chia-Pao Hsu, Deng-Horng Tsai, Ming-Chuen Yip, and Weileun Fang, “Decoupled Z-axis Microgyroscope Using Oblique Comb for Frequency Tuning”, IEEE Sensor’07, Atlanta, USA, 2007.
  • 5. Chia-Pao Hsu, Ming-Chuen Yip, and Weileun Fang, “A Novel SOI Z-axis Accelerometer with Gap Closing Differential Sensing Electrodes”, Transducers‘09, Colorado, USA, 2009. (NSC-96-2628-E-007-007-MY3)
  • 6. Chun-Kai Chan, Chia-Pao Hsu, Mingching Wu, Hong Hochen, Rong-Shun Chen, and Weileun Fang, “A Novel Differential Capacitive-Sensing Dual-axis Accelerometer Design Using Pendulum-Proofmass, Gimbal-springs, and Harm Vertical-combs”, Transducers‘09, Colorado, USA, 2009. (NSC 95-2221-E-007 -068 -MY3)
  • 7. Tsung-Lin Tang, Chia-Pao Hsu, Wen-Chien Chen, and Weileun Fang, “The Double-Side Electroplating and Slender Ferromagnetic Patterns Torque-Enhancement Design For Magnetostatic Actuator”, Transducers‘09, Colorado, USA, 2009.
  • 8. Chia-Pao Hsu, Ming-Chuen Yip, and Weileun Fang, “Implementation of Gap-Closing Differential Capacitive Sensing Z-axis Accelerometer on SOI Wafer”, J. Micromech. Microeng., 19, 2009
  • Autobiography

    • Chih-ming Sun was born in Taipei, Taiwan, in 1980. He received his Master degree from department of mechanical engineering, National Chiao Tung University in 2004. Currently he is a PhD candidate in department of power mechanical engineering, National Tsing Hua university, Taiwan. His research focuses on SOI-based 3-axis accelerometer with single proof-mass, and differential capacitive electrodes design.