Hsieh-Shen Hsieh was born in Changhua, Taiwan, in 1977. He received his bachelor's and master's degrees from the Department of Mechanical Engineering at National Cheng-Kung University, Taiwan, in 2000 and 2002 respectively. He joined Delta Electronics, Inc. for MEMS sensor development, Taiwan, in 2003. Currently he is also studying for PhD degree
in the Power Mechanical Engineering Department, National Tsing Hua University, Taiwan. His research interests include MEMS sensor, computer-aided analysis of MEMS,and robust design.
Yu-Che Huang was born in Yilan, Taiwan, in 1980. He received his Master degree from the Aerospace and System Engineering Department of Feng Chia University in 2004. Currently he is studying for the PhD degree in Power Mechanical Engineering Department, National Tsing Hua University, Taiwan. His major research interests include Radio frequency(RF)
passive component design, fabrication, packaging and process integration, LIGA-Like fabrication process, magnetic actuators, and finite element analysis.