Jerwei Hsieh was born in Taipei, Taiwan. He received his Ph.D. degree from National Tsing-Hua University with Prof. Weileun Fang in 2002. His doctoral research focused on the development of Electrostatic Vertical Actuator, Gyroscope, and BELST - a versatile fabrication platform. During 2002-2006, he worked as an associate researcher in Instrument Technology Research Center (ITRC), one of the institutes in National Applied Research Laboratories (NARL). From 2007 to 2008, he worked at Chipsense (merged with APM) for a couple of months, and then subsequently going abroad to Stanford University, USA as a visiting scholar with Prof. Roger Howe. After coming back to Taiwan, he joined APM again working in R&D division. Dr. Hsieh has served as the TPC of MNC conference since 2006, and the TPC of IEEE Sensors 2010. He is also the reviewer of Sensors & Actuators. His research interests include Mass production of MEMS, with emphasis on Inertial sensors, Optical MEMS, Resonators, and Pressure/Acoustic sensors.

Hsin-Chang Tsai was born in Chai-Yi, Taiwan, in 1974. He received his B.S. and PhD degree from Power Mechanical Engineering Department of National Tsing Hua University in 1997 and 2003. Currently, he is working in a solar cell research center of BeyondPV that is located in Tainan, Taiwan. His current research interests focus on characterization and improvement of high efficiency thin film solar cell.

Dr. Shen received his B.S. degrees in power mechanical electrical engineering at the HYPERLINK "http://www.ee.ntu.edu.tw/" National Tsing Hua University in 1998. He earned his Ph.D. in biomedical engineering at the National Yang-Ming University in 2004. MEMS microphone in hearing aids application is his graduate study topic.

After completing his Ph.D., Shen joined Chipbond Technologies Corp. as a senior bumping process integration engineer in Oct. 04. In Mar. 2005, he joined tsmc as a principal engineer in product failure analysis. In tsmc, his current job content includes not only the failure analysis support on typical logic/memory semiconductor products, but also the field of special technology, such as MEMS, solid-state lighting, etc.

Wenming Shen was born in Jhungli, Taiwan, R.O.C., in 1958. He received the B.E. degree in Mechanical Engineering from Chung Yuan Christian University, Jhungli, Taiwan, in 1983, and received the M.S. degree in Mechanical Engineering from National Yunlin University of Science & Technology. He received the Ph D. at the Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan, in 2006. He has been engaged in Nissian Motor and Rotom Mfg. R&D Department more than twenty years, research interests include the auto parts design especial for power transmission system such as clutches also contain mechanism and thermal stress analysis.