蔡明霖

  • 現職：Invensense Inc. (USA)
  • 部門：Advanced Technology
  • 職位：MEMS Development Manager
  • 博士畢業論文：Fabrication and Design of variable optical attenuator Fabrication and Design of variable optical attenuator utilizing <111> wafer

    學術專長

  • (a) Course
  • Fabrication of Semiconductor Device: VLSI theory and laboratory
  • Submicron Devices and Processes: Advanced VLSI fabrication process
  • Ultra Precision Machining: Various precision machining techniques
  • Mechanical Vibrations: Multi degree of freedom mechanical vibrations
  • Micro System Design: Various sensors and actuators design, analysis and modeling
  • Analog Integrated Circuit (I) and (II): Various analog integrated circuits design and analysis
  • System Identification: on-line and off-line digitized system idenfication
  • Linear System Theory: Various linear system theories
  • Digital Control System: Basic digital control system theory
  • Nonlinear Control systems: Sliding mode and adaptive control theories
  • Multivariable Control Systems Design: Mu-analysis theory
  • Integrated Optics: Wave guide theoris, grating, and acoustic optics
  • (b) Research Experience
  • Small signal model extraction of SiGe HBT for RF device characterization Major task: model verification
  • Design and optimization for noise and bandwidth for capacitive sensing circuit preamplifier as visiting scholar in ECE CMU in NMASP project for capacitive sensor circuit Major task: circuit optimization
  • Conduct the research project “Development of Micro Inertial Sensor” sponsored by Lightuning Technology Co. Major task: project leader
  • Conduct the research projects “Development of Virtual Reality” and “Micro Rate Gyroscope” sponsored by Walsin Lihwa Co.Major task: fabrication processes development and integration, control circuit design
  • Conduct the research project “Development of Micro-Fabry-Perot”, sponsored by National Precision Instrument Development Center, Taiwan Major task: developed VLSI capacitive sensing circuits
  • 學歷：
  • Visiting scholar in ECE in Carnegie Mellon University with Gary K. Fedder 06/2003~04/2004
  • 國立清華大學動力機械工程所
  • 國立清華大學動力機械工程所
  • 國立清華大學動力機械工程系
  • 經歷：
  • T.A. of the course “Electro-Magnetical MEMS” in power mechanical engineering department at NTHU
  • Research Leader: lead and teach graduate and junior Ph. D. students in experimental skills and research directions for the project
  • 06/03, Scholarship Award: funding from NSC Taiwan as visiting scholar in ECE CMU
  • 6/99, Honor master student: allow to directly pursue doctor degree without master degree
  • Laboratory Experience：
  • LPCVD:Si3N4, low stress nitride and poly-silicon
  • PECVD:SiO2, Si3N4 and a-silicon
  • Thermal oxidation:wet and dry oxidation
  • Diffusion:Phosphorus and boron diffusion
  • Annealing:poly-silicon annealing
  • Curing:Bisbenzocyclobutene (BCB)
  • Dry etching:Si3N4, low stress nitride, SiO2, SCS Si, poly-silicon, BCB RIE and ICP
  • Wet etching:Isotropic SCS Si, poly-silicon, SiO2, Al, and anisotropic SCS Si alkaline etching
  • Hot IPA release:delicate MEMS devices release
  • Lithography:single side and double side lithography process
  • Nanospec and a-stepper:measurement of thin film thickness
  • Surface micromaching: MUMPs-like three poly process and MCM-D-like process
  • Bulk micromaching:<100> and <111> SCS Si etching, BELST and SOI process
  • Wire bonding
  • RF modeling system including Agilent 4142, 8510, 4284 and ICCAP
  • E-Mail：
  • jtsai@invensense.com