真空腔

    白光干涉儀Interferometer (NT1100) –WYKO

  • Features

    • Visualize moving MEMS devices in 3D

    Measure in-plane and out-of-plane dimensions

    Dynamic and static MEMS metrology on a single system

  • System

    • Measurement techniques:
    optical phase-shift and white light vertical scanning interferometry

    Light source:
    integrated, stroboscopic illuminator

  • Static measurement performance

    • Vertical measurement range: 0.1mm to 1mm

    Vertical scan speed: up to 14.4um/s
  • Dynamic measurement performance

    • Vertical measurement range: height or deformations up to 1mm

    Vertical motion resolution:< 1nm
  • Waveforms:
    DC, sine, triangular, rectangular, user-defined
  • Frequency:
    15Hz to 1MHz