白光干涉儀(ZYGO)
- Non-contact measurement
- Measurement range: 1 nm - 20000 μm
- Sub-Angstrom surface and steep machined angles up to 85 degrees measurement
- Automated part focus and setup
- Vibration robust metrology
- ±4 degree high load tilt stage with parcentric correction
雷射共軛焦顯微鏡(Keyence)
- Maximum magnification: 3600x
- Height measurement accuracy: 0.2 + L /100 µm or less ,L = Measuring length
- Width measurement accuracy: Measured value ±2 % or less
- Measurement laser light source: Violet semiconductor laser, 404 nm, 1 mW
- XY stage configuration - operating range: 100 mm x 100 mm
