Teacher
Graduated
Post-Doctor
Doctor
Master
蔡明霖
- 現職:Invensense Inc. (USA)
- 部門:Advanced Technology
- 職位:MEMS Development Manager
- 博士畢業論文:Fabrication and Design of variable optical attenuator Fabrication and Design of variable optical attenuator utilizing <111> wafer
學術專長
- (a) Course
- Fabrication of Semiconductor Device: VLSI theory and laboratory
- Submicron Devices and Processes: Advanced VLSI fabrication process
- Ultra Precision Machining: Various precision machining techniques
- Mechanical Vibrations: Multi degree of freedom mechanical vibrations
- Micro System Design: Various sensors and actuators design, analysis and modeling
- Analog Integrated Circuit (I) and (II): Various analog integrated circuits design and analysis
- System Identification: on-line and off-line digitized system idenfication
- Linear System Theory: Various linear system theories
- Digital Control System: Basic digital control system theory
- Nonlinear Control systems: Sliding mode and adaptive control theories
- Multivariable Control Systems Design: Mu-analysis theory
- Integrated Optics: Wave guide theoris, grating, and acoustic optics
- (b) Research Experience
- Small signal model extraction of SiGe HBT for RF device characterization
Major task: model verification
- Design and optimization for noise and bandwidth for capacitive sensing circuit preamplifier as visiting scholar in ECE CMU in NMASP project for capacitive sensor circuit
Major task: circuit optimization
- Conduct the research project “Development of Micro Inertial Sensor” sponsored by Lightuning Technology Co.
Major task: project leader
- Conduct the research projects “Development of Virtual Reality” and “Micro Rate Gyroscope” sponsored by Walsin Lihwa Co.Major task: fabrication processes development and integration, control circuit design
- Conduct the research project “Development of Micro-Fabry-Perot”, sponsored by National Precision Instrument Development Center, Taiwan
Major task: developed VLSI capacitive sensing circuits
- 學歷:
- Visiting scholar in ECE in Carnegie Mellon University with Gary K. Fedder 06/2003~04/2004
- 國立清華大學動力機械工程所
- 國立清華大學動力機械工程所
- 國立清華大學動力機械工程系
- 經歷:
- T.A. of the course “Electro-Magnetical MEMS” in power mechanical engineering department at NTHU
- Research Leader: lead and teach graduate and junior Ph. D. students in experimental skills and research directions for the project
- 06/03, Scholarship Award: funding from NSC Taiwan as visiting scholar in ECE CMU
- 6/99, Honor master student: allow to directly pursue doctor degree without master degree
- Laboratory Experience:
- LPCVD:Si3N4, low stress nitride and poly-silicon
- PECVD:SiO2, Si3N4 and a-silicon
- Thermal oxidation:wet and dry oxidation
- Diffusion:Phosphorus and boron diffusion
- Annealing:poly-silicon annealing
- Curing:Bisbenzocyclobutene (BCB)
- Dry etching:Si3N4, low stress nitride, SiO2, SCS Si, poly-silicon, BCB RIE and ICP
- Wet etching:Isotropic SCS Si, poly-silicon, SiO2, Al, and anisotropic SCS Si alkaline etching
- Hot IPA release:delicate MEMS devices release
- Lithography:single side and double side lithography process
- Nanospec and a-stepper:measurement of thin film thickness
- Surface micromaching: MUMPs-like three poly process and MCM-D-like process
- Bulk micromaching:<100> and <111> SCS Si etching, BELST and SOI process
- Wire bonding
- RF modeling system including Agilent 4142, 8510, 4284 and ICCAP
- E-Mail:
- jtsai@invensense.com