孫志銘

  • 現職:原相科技
  • 公司網頁:www.pixart.com.tw
  • 博士畢業論文:
    CMOS-MEMS 雙面後製程平台之開發及其於微感測器之整合與應用S

    Conference

  • C.-M. Sun, M.-H. Tsai, C. Wang, Y.-C Liu, and W. Fang, “Implementation of A Monolithic TPMS Using CMOS-MEMS Technique,” Transducers’09, Denver, Colorado.
  • C.-M. Sun , M.-H. Tsai, and W. Fang,” Design and Implementation of a Novel CMOS-MEMS Single Proof-mass Tri-axis Accelerometer,” IEEE MEMS 2009, Jan.25~29, Sorrento, Italy.
  • C.-M. Sun , C. Wang, M.-H. Tsai, H-S Hsieh, and W. Fang,” A Novel Double-side CMOS-MEMS Post Processing for Monolithic Sensor Integration,” IEEE MEMS 2008, Jan.13~17, Tucson, AZ, pp.90-93.
  • W. Fang, and C.-M. Sun,” Towards Sensor Integration Using CMOS MEMS Platform,” IEEJ SMS Symposium on Sensors, Micromachines & Applied Systems 2008 ,Oct.22-24, Okinawa, Japan.
  • M.-H. Tsai, C. Wang, C.-M. Sun, and W. Fang, “A Novel CMOS Out-of-Plane Accelerometer with Fully-differential Gap-closing Capacitance Sensing Electrodes,” APCOT 2008, June. 22-25,Tainan,Taiwan
  • C.-M. Sun , C. Wang, M.-H. Tsai, H-S Hsieh, and W. Fang,” A Novel Double-side CMOS-MEMS Post Processing for Monolithic Sensor Integration,” APCOT 2008, June. 22-25,Tainan,Taiwan
  • M.-H. Tsai, C.-M. Sun, C. Wang, J. Lu, and W. Fang, “A Monolithic 3D Fully-differential CMOS Accelerometer,” The 3rd Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Sanya, China, Jan 6~9, 2008, pp. 1067-1070.
  • M.-H Tsai, C. Wang, C.-M Sun and W. Fang, “A Novel CMOS Out-of-plane Accelerometer with Fully-differential Sensing Circuit and Sub-micron Gap,” Transducers’ 07, June.10~14, 2007,Lyon, FRANCE, pp. 1487-1490
  • C. Wang, S.-Y. Lee, C.-M. Sun, M.-H. Tsai, and W. Fang, , “Implementation of CMOS-MEMS Compound Lens,” IEEE/LEOS OMEMS and Nanophotonics 2007, Aug. 12~16.2007. Hualien, Taiwan.pp.143-144.
  • C.-M. Sun, C.-W.i Wang, W. Fang, 2007, “CMOS MEMS Lorentz Force Dual-axis Scanning-Stage,”  The 2nd Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Jan,16~19,2007,Bangkok, Thailand,pp 580-583.
  • C.-M. Sun, C. Wang, D.-H. Liu, Michael S.-C. Lu, W.Fang,C.-J. Liang, H.-S. Hsieh, H.-C. Chang,and T.-K. Shing “A Novel CMOS MEMS Accelerometer with Four Sensing Finger Arrays,” IEEE sensors, Daegu, Korea, Oct.21~24, 2006.pp.1119~1122
  • 學歷:
  • 09/05-07/10 Carnegie Mellon University, Pittsburgh, PA, U.S.A Visiting Ph. D. student in Dep. of Electrical and Computer Engineering
  • 07/06-07/10 National Tsing Hua University, Hsin-Chu, Taiwan Ph. D. student in Institute of NanoEngineering and MicroSystem.
  • 07/04-06/06 National Tsing Hua University, Hsin-Chu, Taiwan Master Degree in Institute of MEMS
  • 07/00-06/04 National Cheng Kung University, Tainan, Taiwan Bachelor Degree in Mechanical Engineering
  • 經歷:
  • 國科會千里馬計畫美國 Carnegie Mellon University 交換學生
  • 研究方向:
  • CMOS MEMS platform for sensor integration. Design, fabrication, and test of capacitance sensors, included 3-axis accelerometer, pressure sensor, tactile sensor, temperature sensor.and gyroscope. Design, fabrication, and measurement of CMOS actuators, included electrostatic, thermal, and magnetic actuator. System on chip fabrication and integration technique. Development of standard CMOS MEMS post processing on TSMC. MEMS structure and sensing circuit interface. Inertial measurement unit technique. Tire Pressure Monitoring Systems on the single CMOM chip
  • Journal papers:
  • C.-M. Sun, C.-W. Wang, and W. Fang, “On the Sensitivity Improvement of CMOS Capacitive Accelerometer,” Sensors and Actuators A, 141. pp 347-352, 2008.
  • C.-M. Sun, C. Wang, M.-H. Tsai, H-S Hsieh, and W. Fang, “Monolithic integration of capacitive sensors using a double-side CMOSMEMS post process” J. of Micromechanics and Microengineering, 18, 2008.
  • C. Wang, M.-H. Tsai, C.-M. Sun, and W. Fang, “A Novel CMOS Out-of-Plane Accelerometer with Fully-differential Gap-closing Capacitance Sensing Electrodes,” J. of Micromechanics and Microengineering, 17, pp.1275-1280, 2007.
  • C.-M. Sun, M.-H. Tsai, Y.-C. Liu, and W. Fang, “Implementation of a Monolithic Single Proof-Mass Tri-Axis Accelerometer Using CMOS-MEMS Technique,” IEEE Transactions on Electron Devices, Vol. 57, issue 7, pp. 1670-1679, 2010.(Corresponding author)
  • 興趣:
  • 運動、電影
  • E-Mail:
  • D9535812@oz.nthu.edu.tw / chihmsun@gmail.com