Visualize moving MEMS devices in 3D
Measure in-plane and out-of-plane dimensionsDynamic and static MEMS metrology on a single system
Measurement techniques:
optical phase-shift and white light vertical scanning interferometry
Light source:
integrated, stroboscopic illuminator
Vertical measurement range: 0.1mm to 1mm
Vertical scan speed: up to 14.4um/sVertical measurement range: height or deformations up to 1mm
Vertical motion resolution:< 1nm