In traditions, MEMS Capacitive accelerometer consists of a proof mass, supporting springs, sensing electrodes, self-diagnostic actuators, and curvature matching frame. The proof mass of the spring-mass system will be excited after subject-ing to the acceleration. 　

Thus, the motion of the proof mass will lead to the capacitance change of sensing electrodes, so as to determine the acceleration.

In-Plane CMOS Accelerometer

Out-of-plane CMOS Accelerometer

CMOS Vibratory Gyroscope

CMOS Vibratory Gyroscope

CMOS Vibratory Gyroscope